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SURFACE ROUGHNESS IN SILICON CARBIDE TECHNOLOGY

Author(s):
K. Chang
T. Witt
A. Hoff
R. Woodin
R. Ridley
G. Dolny
K. Shanmugasundaram
E. Oborina
J. Ruzyllo
4 more
Publication title:
Cleaning Technology in Semiconductor Device Manufacturing IX
Title of ser.:
ECS transactions
Ser. no.:
1(3)
Pub. date:
2006
Page(from):
228
Page(to):
233
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774291 [1566774292]
Language:
English
Call no.:
E23400/1-3
Type:
Conference Proceedings

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