METAL DEPOSITION ON Ge SURFACES
- Author(s):
S. Sioncke B. Onsia K. Struys J. Rip R. Vos M. Meuris P. Mertens A. Theuwis - Publication title:
- Cleaning Technology in Semiconductor Device Manufacturing IX
- Title of ser.:
- ECS transactions
- Ser. no.:
- 1(3)
- Pub. Year:
- 2006
- Page(from):
- 220
- Page(to):
- 227
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774291 [1566774292]
- Language:
- English
- Call no.:
- E23400/1-3
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
7
Conference Proceedings
Etch Rates of Ge, GaAs and InGaAs in Acids, Bases and Peroxide Based Mixtures
Electrochemical Society |
Electrochemical Society |
8
Conference Proceedings
SURFACE CHARACTERISATION OF Si AFTER HF TREATMENTS AND ITS INFLUENCE ON THE DIELECTRIC BREAKDOWN OF THERMAL OXIDES
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
12
Conference Proceedings
EVALUATION OF MEGASONIC CLEANING SYSTEMS FOR PARTICLE REMOVAL EFFICIENCY AND DAMAGING
Electrochemical Society |