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SELECTIVE ETCHING OF SiGe FOR REMOVAL OF DUMMY LAYERS IN FULLY SILICIDED GATE ARCHITECTURES

Author(s):
J. Snow
R. Vos
K. G. Anil
H. Kraus
K. Xu
F. Grinninger
G. Wagner
F. Kovacs
P. W. Mertens
4 more
Publication title:
Cleaning Technology in Semiconductor Device Manufacturing IX
Title of ser.:
ECS transactions
Ser. no.:
1(3)
Pub. Year:
2006
Page(from):
207
Page(to):
213
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774291 [1566774292]
Language:
English
Call no.:
E23400/1-3
Type:
Conference Proceedings

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