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IMPROVED DEFECTIVITY FOR BEOL CLEANS USING SINGLE WAFER MEGASONICS

Author(s):
Publication title:
Cleaning Technology in Semiconductor Device Manufacturing IX
Title of ser.:
ECS transactions
Ser. no.:
1(3)
Pub. date:
2006
Page(from):
194
Page(to):
198
Pages:
5
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774291 [1566774292]
Language:
English
Call no.:
E23400/1-3
Type:
Conference Proceedings

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