DEVELOPMENT OF HIGH SELECTIVITY POLY-Si STRIP PROCESS BY USING REMOTE PLASMA

DEVELOPMENT OF HIGH SELECTIVITY POLY-Si STRIP PROCESS BY USING REMOTE PLASMA

Author(s):

J. Han

Publication title:

Cleaning Technology in Semiconductor Device Manufacturing IX

Title of ser.:

ECS transactions

Ser. no.:

1(3)

Pub. Year:

2006

Page(from):

119

Page(to):

124

Pages:

6

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

19385862

ISBN:

9781566774291 [1566774292]

Language:

English

Call no.:

E23400/1-3

Type:

Conference Proceedings

Details

TDL ID:	ZA00047097
Series ID:	PA00000034
Conf. info. (Name):	International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ; Fall Meeting of the Electrochemical Society
Conf. info. (Number):	9th ; 2005
Conf. info. (Venue):	Los Angeles, California, USA
Conf. info. (Date):	2005.10.00

Similar Items:

1 Conference Proceedings A STUDY ON SELECTIVE SiGe ETCH FOR THREE-DIMENSIONAL Si STRUCTURE APPLICATIONS H. Lee, J. Han, W. Shim, C. Hong, H. Cho, J. Moon Electrochemical Society	7 Conference Proceedings Characterization of Contact Formation Process for High Efficiency Solar Cell Using Design of Experiment (DOE) S.J. Lee, S.Y. Moon, Se.W. Jung, S.S. Han, S.J. Hong Trans Tech Publications
2 Conference Proceedings THE MECHANISM OF POLY-Si ETCHING DURING POLY/W GATE CLEANING BY FLUORINE BASED CLEANING SOLUTION Kim, S.Y., Choi, S.J., Hong, C.K., Han, W.S., Moon, J.T. Electrochemical Society	8 Conference Proceedings Development of Strip Casting Process for Electrolytic Tough Pitch Copper Kim, S. K., Cho, H., Lee, J. K., Kim, W. Y., Jo, H. H. Trans Tech Publications
3 Conference Proceedings Resolution improvement of chemical-amplification resist using process-induced effect correction Choi,J.-H., Kim,C.-Y., Lee,J.-Y., Moon,S.-W., Choi,S.-W., Han,W.-S., Sohn,J.-M. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Development of Large Thermal Vacuum Chamber (Φ8m Χ L10m) Lee, S. H., Seo, H.-J., Cho, H., Moon, G.-W., Choi, S.-W. ESA Communication Production Office
4 Conference Proceedings A study of Cr to Mosi in situ dry etching process to reduce plasma induced defect [5992-25] Jang, I. -Y., Park, Y. -J., Kwon, H. -J., Moon, S. -Y., Choi, S. -W., Han, W. S. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Process monitoring system for instant defect detection and analysis in 65 nm node photomask fabrications [5853-34] Cho, Y.-S., Park, J.-H., Cho, W.-I., Kim, Y.-H., Choi, S.-W., Han, W.-S. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Study of Over-polishing at the Edge of a Pattern in Selective CMP Park, J.-H., Park, D.-W., Lee, J.-D., Hong, C., Han, W.-S., Moon., J.-T. Electrochemical Society	11 Conference Proceedings Design of Manufacturing Process of Oxygen-Free High Conductivity Copper Using Mahalanobis-Distance Outlier Detection Method J.I. Lee, J.H. Lee, S.H. Park, H.S. Choi, H. Cho, H.H. Jo, S.K. Kim, H.C. Kwon, J.E. Hong Trans Tech Publications
6 Conference Proceedings Growth and characterization of InGaN/GaN heterostructures using plasma-assisted molecular beam epitaxy Shim, K. H., Hong, S. E., Kim, K. H., Paek, M. C., Cho, K. I. MRS-Materials Research Society	12 Conference Proceedings Decomposition of VOCs using mesoporous TiO2 in a silent plasma Hong, W. -H., Choi, K. -S., Kim, C. -J., Park, D. -W. Elsevier

1

2

3

4

5

6

7

8

9

10

11

12