SURFACE PREPARATION ISSUES ASSOCIATED WITH HIGH-к/METAL GATE DEVICES
- Author(s):
J. Bamett N. Moumen J. J. Peterson P. Kirsch A. Neugroschel G. Bersuker H . R. Huff - Publication title:
- Cleaning Technology in Semiconductor Device Manufacturing IX
- Title of ser.:
- ECS transactions
- Ser. no.:
- 1(3)
- Pub. Year:
- 2006
- Page(from):
- 43
- Page(to):
- 50
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774291 [1566774292]
- Language:
- English
- Call no.:
- E23400/1-3
- Type:
- Conference Proceedings
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