Investigation of Ohmic Contact Corrosion in GaAs HBT Fabrication
- Author(s):
- Publication title:
- State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII) and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI
- Title of ser.:
- ECS transactions
- Ser. no.:
- 1(2)
- Pub. Year:
- 2006
- Page(from):
- 75
- Page(to):
- 87
- Pages:
- 13
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774314 [1566774314]
- Language:
- English
- Call no.:
- E23400/1-2
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
Materials Research Society |
Materials Research Society |
8
Conference Proceedings
A Microstructural and Electrical Investigation of Pd/Ge/Ti/Au Ohmic Contact to n-Type GaAs
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
10
Conference Proceedings
INVESTIGATION OF Ge, As, AND Au DIFFUSION IN NON-ALLOYED EPITAXIAL Au-Ge OHMIC CONTACTS TO n-GaAs USING SECONDARY ION MASS SPECTROSCOPY BACKSIDE SPUTTER …
Materials Research Society |
5
Conference Proceedings
AN INITIAL INVESTIGATION OF THE ELECTRICAL AND MICROSTRUCTURAL PROPERTIES OF Au/Ti AND Au/Pd/Ti OHMIC CONTACT STRUCTURES FOR AlGaAs/GaAs HBTs
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
12
Conference Proceedings
Comparison of Pd/Ge/Ti/Pt and Pd/Si/Ti/Pt Ohmic Contacts to N-Type InGaAs for AlGaAs/GaAs HBTs
Trans Tech Publications |