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Oxide-Nitride-Oxide Dielectric Stacks with Embedded Si-Nanoparticles Fabricated by Low-Energy Ion-Beam- Synthesis

Author(s):
Vassilios Ioannou-Sougleridis
Panagiotis Dimitrakis
Vassilios Em. Vamvakas
Pascal Normand
Caroline Bonafos
Sylvie Schamm
Gerard Ben Assayag
2 more
Publication title:
Materials and processes for nonvolatile memories II : symposium held April 10-13, 2007, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
997
Pub. Year:
2007
Page(from):
121
Page(to):
126
Pages:
6
Pub. info.:
Warrendale, Pa.: Materiaeditors, Tingkai Li ... [et al.] ls Research Society
ISSN:
02729172
ISBN:
9781558999572 [1558999574]
Language:
English
Call no.:
M23500/997
Type:
Conference Proceedings

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