Blank Cover Image

Reliability of Silicon Nitride Gate Dielectric in Vertical Thin-Film Transistors

Author(s):
M. Moradi
D. Striakhilev
I. Chan
A. Nathan
N.I. Cho
H.G. Nam
1 more
Publication title:
Amorphous and polycrystalline thin-film silicon science and technology--2007 : symposium held April 9-13, 2007, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
989
Pub. Year:
2007
Page(from):
185
Page(to):
190
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558999497 [1558999493]
Language:
English
Call no.:
M23500/989
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Amorphous Silicon Vertical Thin Film Transistor For High Density Integration

Chan, Isaac, Nathan, Arokia

Materials Research Society
7 Conference Proceedings Process Considerations for Small Area a-Si:H Vertical Thin Film Transistors

Chan, I., Park, B., Sazonov, A., Nathan, A.

Electrochemical Society
2 Conference Proceedings Characterization of Silicon Nitride Films for the Thin Film Transistor Gate Dielectric

Abbasi, S., Abu-Safe, H., Naseem, H., Brown, W.

Electrochemical Society
8 Conference Proceedings SILICON-NITRIDE FOR AMORPHOUS SILICON THIN-FILM TRANSISTORS

Nickel, N.H., Fuhs, W., Mell, H., Beyer, W.

Materials Research Society
3 Conference Proceedings Development of Silicon Nitride Films for Gate Dielectric Applications

Brady, D., Watt, V.H.C., Karamcheti, A., Vishnubhotla, L., Bersuker, G., Kim, S., Zietzoff, P., Gilmer, M., Guan, J., …

Electrochemical Society
9 Conference Proceedings Dielectric Effects in Laser-Crystallised Polycrystalline Silicon Thin Film Transistors

Masterton, G. H., Gibson, R. A. G., Hack, M.

MRS - Materials Research Society
4 Conference Proceedings Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications

Pereira, L., Aguas, H., Igreja, R., Martins, R.M.S., Nedev, N., Raniero, L., Fortunato, E., Martins, R.

Trans Tech Publications
10 Conference Proceedings Spin-On Polymer Gate Dielectric for High Performance Organic Thin Film Transistors

Gundlach, D. J., Jackson, T. N., Sheraw, C. D.

Materials Research Society
5 Conference Proceedings 100-nm Channel Length a-Si:H Vertical Thin Film Transistors

Chan, Isaac, Nathan, Arokia

Materials Research Society
11 Conference Proceedings Electrical Hysteresis Behavior of Low Temperature Polycrystalline Silicon Thin Film Transistors

D. Nam, H. Lee, S. Jung, T. Ahn, C. Kim

Electrochemical Society
6 Conference Proceedings 100-nm Channel Length a-Si:H Vertical Thin Film Transistors

Chan, Isaac, Nathan, Arokia

Materials Research Society
12 Conference Proceedings Micro-Structures in Vertical Amorphous-Silicon Thin-Film Transistors

Saitoh, A., Awaya, S., Suyama, N., Matsumura, M.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12