Weighted least-square approach for simultaneous measurement of multiple reflective surfaces

Weighted least-square approach for simultaneous measurement of multiple reflective surfaces

Author(s):

S. Tang ( KLA-Tencor (USA) )
R. E. Bills ( KLA-Tencor (USA) )
K. Freischlad ( KLA-Tencor (USA) )

Publication title:

Optical manufacturing and testing VII : 28-29 August 2007, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6671

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819468192 [0819468193]

Language:

English

Call no.:

P63600/6671

Type:

Conference Proceedings

Details

TDL ID:	ZA00046954
Series ID:	PA00000029
Conf. info. (Name):	SPIE Optical Engineering and Applications : Optical Manufacturing and Testing
Conf. info. (Number):	2007 : 7th
Conf. info. (Venue):	San Diego, California, USA
Conf. info. (Date):	2007.08.28-2007.08.29

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