Characterization of radio-frequency sputtered AlN films by spectroscopic ellipsometry

Characterization of radio-frequency sputtered AlN films by spectroscopic ellipsometry

Author(s):

D. Huang ( Univ. of Puerto Rico (USA) )

K. Uppireddi ( Univ. of Puerto Rico (USA) )

V. M. Pantojas ( Univ. of Puerto Rico (USA) )

W. Otano-Rivera ( Univ. of Puerto Rico (USA) )

B. R. Weiner ( Univ. of Puerto Rico (USA) )

G. Morell ( Univ. of Puerto Rico (USA) )

1 more

Publication title:

Nanocoatings : 26-27 August 2007, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6647

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467959 [0819467952]

Language:

English

Call no.:

P63600/6647

Type:

Conference Proceedings

Details

TDL ID:	ZA00046943
Series ID:	PA00000029
Conf. info. (Name):	SPIE NanoScience and Engineering : Nanocoatings
Conf. info. (Number):	2007
Conf. info. (Venue):	San Diego, California, USA
Conf. info. (Date):	2007.08.26-2007.08.27

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