Wet-etching characteristics of GeSbTe phase-change films for high density media

Wet-etching characteristics of GeSbTe phase-change films for high density media

Author(s):

J.-H. Kim ( LG Elite (South Korea) )
J.-S. Lim ( LG Elite (South Korea) )
J.-S. Lee ( LG Elite (South Korea) )

Publication title:

Optical Data Storage 2007 : 20-23 May 2007, Portland, Oregon, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6620

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467621 [0819467626]

Language:

English

Call no.:

P63600/6620

Type:

Conference Proceedings

Details

TDL ID:	ZA00046927
Series ID:	PA00000029
Conf. info. (Name):	Optical Data Storage
Conf. info. (Number):	2007
Conf. info. (Venue):	Portland, Oregon, USA
Conf. info. (Date):	2007.05.20-2007.05.23

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