Structure modeling for scatterometric characterization of photoinduced surface-relief gratings
- Author(s):
P. C. Logofatu ( National Institute for Laser, Plasma and Radiation Physics (Romania) ) I. Apostol ( National Institute for Laser, Plasma and Radiation Physics (Romania) ) M. Castex ( Lab. de Physique des Lasers, Univ. Paris-Nord (France) ) V. Damian ( National Institute for Laser, Plasma and Radiation Physics (Romania) ) I. Iordache ( National Institute for Laser, Plasma and Radiation Physics (Romania) ) M. Bojan ( National Institute for Laser, Plasma and Radiation Physics (Romania) ) D. Apostol ( National Institute for Laser, Plasma and Radiation Physics (Romania) ) - Publication title:
- Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6617
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819467591 [0819467596]
- Language:
- English
- Call no.:
- P63600/6617
- Type:
- Conference Proceedings
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