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Structure modeling for scatterometric characterization of photoinduced surface-relief gratings

Author(s):
P. C. Logofatu ( National Institute for Laser, Plasma and Radiation Physics (Romania) )
I. Apostol ( National Institute for Laser, Plasma and Radiation Physics (Romania) )
M. Castex ( Lab. de Physique des Lasers, Univ. Paris-Nord (France) )
V. Damian ( National Institute for Laser, Plasma and Radiation Physics (Romania) )
I. Iordache ( National Institute for Laser, Plasma and Radiation Physics (Romania) )
M. Bojan ( National Institute for Laser, Plasma and Radiation Physics (Romania) )
D. Apostol ( National Institute for Laser, Plasma and Radiation Physics (Romania) )
2 more
Publication title:
Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6617
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467591 [0819467596]
Language:
English
Call no.:
P63600/6617
Type:
Conference Proceedings

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