Blank Cover Image

Merged contact OPC using pattern type specific modeling and correction

Author(s):
S. Suh ( Samsung Electronics Co., Ltd. (South Korea) )
S. Kim ( Samsung Electronics Co., Ltd. (South Korea) )
S. Lee ( Samsung Electronics Co., Ltd. (South Korea) )
Y. Kim ( Samsung Electronics Co., Ltd. (South Korea) )
J. Lee ( Samsung Electronics Co., Ltd. (South Korea) )
C. Kang ( Samsung Electronics Co., Ltd. (South Korea) )
1 more
Publication title:
Photomask and next-generation lithography mask technology XIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6607
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467454 [0819467456]
Language:
English
Call no.:
P63600/6607
Type:
Conference Proceedings

Similar Items:

Suh, S., Kang, Y., Kim, I., Woo, S., Cho, H., Moon, J.

SPIE - The International Society of Optical Engineering

Y.-C. Kim, S. Kim, S. Suh, Y. Cheon, S. Lee

Society of Photo-optical Instrumentation Engineers

Y. Kim, I. Kim, J. Park, S. Kim, S. Suh, Y. Cheon, S. Lee, J. Lee, C. Kang, J. Moon, J. Cobb

SPIE - The International Society of Optical Engineering

Y. Shim, J. Kang, S. Lee, J. Kim, K. Kim

SPIE - The International Society of Optical Engineering

Y. -C. Kim, D. Kim, I. Kim, S. Kim, S. Suh, Y. -J. Chun, S. Lee, J. Lee, C. -J. Kang, J. Moon, K. Taravade

SPIE - The International Society of Optical Engineering

Y.-D. Jeon, S.-U. Lee, J. Choi, J. Kim, J. Han

Society of Photo-optical Instrumentation Engineers

Kim, S.-W., Lee, S.-W., Park, C.-M., Choi, S.-H., Lee, Y.-M., Kang, Y., Yeo, G.-S., Lee, J.-H., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

M. Jeong, S. Lee, J. Jung, C. Hyon, I. Choi, Y. Kang, Y. Park

SPIE - The International Society of Optical Engineering

Seok, S.-J., Suh, D.-W., Kang, C.-H., Kim, G.-J., Lee, J.-S.

SPIE-The International Society for Optical Engineering

Kim, I.-S., Suh, S., Jung, S., Lee, E., Kang, Y.-S., Lee, S., Woo, S.-G., Cho, H.

SPIE - The International Society of Optical Engineering

Kim, S., Kim, Y.-C., Suh, S., Lee, S., Cho, H., Moon, J., Cobb, J.

SPIE - The International Society of Optical Engineering

Lee,I.-S., Nam,K.-H., Kim,L.-J., Shin,C., Kim,H.-S.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12