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The design and fabrication of an optical fiber MEMS pressure sensor

Author(s):
  • Y. Ge ( Nanjing Normal Univ. (China) )
  • M. Wang ( Nanjing Normal Univ. (China) )
  • H. Rong ( Nanjing Normal Univ. (China) )
  • X. Chen ( Nanjing Normal Univ. (China) )
Publication title:
Fundamental Problems of Optoelectronics and Microelectronics III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6595
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467270 [0819467278]
Language:
English
Call no.:
P63600/6595
Type:
Conference Proceedings

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