Laser interferometer used for nanometer vibration measurements

Laser interferometer used for nanometer vibration measurements

Author(s):

J. Sun ( Harbin Engineering Univ. (China) )
J. Yang ( Harbin Engineering Univ. (China) )
Z. Liu ( Harbin Engineering Univ. (China) )
L. Yuan ( Harbin Engineering Univ. (China) )

Publication title:

Fundamental Problems of Optoelectronics and Microelectronics III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6595

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467270 [0819467278]

Language:

English

Call no.:

P63600/6595

Type:

Conference Proceedings

Details

TDL ID:	ZA00046902
Series ID:	PA00000029
Conf. info. (Name):	Fundamental Problems of Optoelectronics and Microelectronics
Conf. info. (Number):	2006 : 3rd
Conf. info. (Venue):	Harbin, China
Conf. info. (Date):	2006.09.12-2006.09.14

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