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Three-dimensional simulation of sacrificial etching

Author(s):
Publication title:
Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6589
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467171 [0819467170]
Language:
English
Call no.:
P63600/6589
Type:
Conference Proceedings

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