Two-dimensional MEMS array for maskless lithography and wavefront modulation
- Author(s):
D. Lopez ( Alcatel Lucent, Bell Labs. (USA) ) V. A. Aksyuk ( Alcatel Lucent, Bell Labs. (USA) ) G. P. Watson ( Alcatel Lucent, Bell Labs. (USA) ) W. M. Mansfield ( Alcatel Lucent, Bell Labs. (USA) ) R. Cirelli ( Alcatel Lucent, Bell Labs. (USA) ) F. Klemens ( Alcatel Lucent, Bell Labs. (USA) ) F. Pardo ( Alcatel Lucent, Bell Labs. (USA) ) E. Ferry ( Alcatel Lucent, Bell Labs. (USA) ) J. Miner ( Alcatel Lucent, Bell Labs. (USA) ) T. W. Sorsch ( Alcatel Lucent, Bell Labs. (USA) ) M. Peabody ( Alcatel Lucent, Bell Labs. (USA) ) J. Bower ( Alcatel Lucent, Bell Labs. (USA) ) C. S. Pai ( Alcatel Lucent, Bell Labs. (USA) ) J. Gates ( Alcatel Lucent, Bell Labs. (USA) ) - Publication title:
- Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6589
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819467171 [0819467170]
- Language:
- English
- Call no.:
- P63600/6589
- Type:
- Conference Proceedings
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