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High-sensitivity 25μm and 50μm pitch microcantilever IR imaging arrays

Author(s):
Publication title:
Infrared technology and applications XXXIII : 9-13 April 2007, Orlando, Florida, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6542
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466648 [0819466646]
Language:
English
Call no.:
P63600/6542
Type:
Conference Proceedings

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