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Characteristics optimization of mask materials for hyper-NA lithography

Author(s):
Y. Morikawa ( Dai Nippon Printing Co., Ltd. (Japan) )
T. Suto ( Dai Nippon Printing Co., Ltd. (Japan) )
T. Nagai ( Dai Nippon Printing Co., Ltd. (Japan) )
Y. Inazuki ( Dai Nippon Printing Co., Ltd. (Japan) )
T. Adachi ( Dai Nippon Printing Co., Ltd. (Japan) )
Y. Kitahata ( Dai Nippon Printing Co., Ltd. (Japan) )
T. Yokoyama ( Dai Nippon Printing Co., Ltd. (Japan) )
N. Toyama ( Dai Nippon Printing Co., Ltd. (Japan) )
H. Mohri ( Dai Nippon Printing Co., Ltd. (Japan) )
N. Hayashi ( Dai Nippon Printing Co., Ltd. (Japan) )
5 more
Publication title:
EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6533
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466556 [0819466557]
Language:
English
Call no.:
P63600/6533
Type:
Conference Proceedings

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