Measurement of stresses in MEMS structures by stress release
- Author(s):
- D. Vogel ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
- N. Sabate ( Centre Nacional de Microelectronica, CNM-CSIC (Spain) )
- A. Gollhardt ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
- B. Michel ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
- Publication title:
- Nanosensors, microsensors, and biosensors and systems 2007 : 21-22 March 2007, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6528
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466495 [0819466492]
- Language:
- English
- Call no.:
- P63600/6528
- Type:
- Conference Proceedings
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