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Measurement of stresses in MEMS structures by stress release

Author(s):
  • D. Vogel ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
  • N. Sabate ( Centre Nacional de Microelectronica, CNM-CSIC (Spain) )
  • A. Gollhardt ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
  • B. Michel ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
Publication title:
Nanosensors, microsensors, and biosensors and systems 2007 : 21-22 March 2007, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6528
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466495 [0819466492]
Language:
English
Call no.:
P63600/6528
Type:
Conference Proceedings

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