Comparison of techniques for measurement of residual stresses in multilayered micro-electro-mechanical devices

Comparison of techniques for measurement of residual stresses in multilayered micro-electro-mechanical devices

Author(s):

M. Vechery ( Univ. of Maryland, College Park (USA) and Army Research Lab. (USA) )
A. Dick ( Univ. of Maryland, College Park (USA) )
B. Balachandran ( Univ. of Maryland, College Park (USA) )
M. Dubey ( Army Research Lab. (USA) )

Publication title:

Nanosensors, microsensors, and biosensors and systems 2007 : 21-22 March 2007, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6528

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466495 [0819466492]

Language:

English

Call no.:

P63600/6528

Type:

Conference Proceedings

Details

TDL ID:	ZA00046835
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures : Nanosensors, Microsensors, and Biosensors and Systems
Conf. info. (Number):	2007
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2007.03.21-2007.03.22

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