
Characteristics analysis of polarization module on optical proximity effect
- Author(s):
C. Park ( Hynix Semiconductor, Inc. (South Korea) ) J. Hong ( Hynix Semiconductor, Inc. (South Korea) ) K. Yang ( Hynix Semiconductor, Inc. (South Korea) ) T. Theeuwes ( ASML (Netherlands) ) F. Gautier ( ASML (Netherlands) ) Y. Min ( ASML TDC Asia (Taiwan) ) A. Chen ( ASML TDC Asia (Taiwan) ) H. Yang ( Hynix Semiconductor, Inc. (South Korea) ) D. Yim ( Hynix Semiconductor, Inc. (South Korea) ) J. Kim ( Hynix Semiconductor, Inc. (South Korea) ) - Publication title:
- Optical microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6520
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466396 [0819466395]
- Language:
- English
- Call no.:
- P63600/6520
- Type:
- Conference Proceedings
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