A comparative study for mask defect tolerance on phase and transmission for dry and immersion 193-nm lithography
- Author(s):
- M. L. Ling ( National Univ. of Singapore (Singapore) )
- G. S. Chua ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- C. J. Tay ( National Univ. of Singapore (Singapore) )
- C. Quan ( National Univ. of Singapore (Singapore) )
- Q. Lin ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Publication title:
- Optical microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6520
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466396 [0819466395]
- Language:
- English
- Call no.:
- P63600/6520
- Type:
- Conference Proceedings
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