Extending immersion lithography to the 32-nm node
- Author(s):
S. Warrick ( Freescale Semiconductor (France) ) W. Conley ( Freescale Semiconductor (France) ) V. Farys ( ST Microelectronics (France) ) M. Benndorf ( NXP Semiconductors (France) ) J. Gemmink ( NXP Semiconductors (France) ) Y. Trouiller ( ST Microelectronics (France) ) J. Belledent ( NXP Semiconductors (France) ) D. Jovanovic ( Freescale Semiconductor (France) ) P. Gouraud ( ST Microelectronics (France) ) - Publication title:
- Optical microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6520
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466396 [0819466395]
- Language:
- English
- Call no.:
- P63600/6520
- Type:
- Conference Proceedings
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