Blank Cover Image

Pitch doubling through dual-patterning lithography challenges in integration and litho budgets

Author(s):
M. Dusa ( ASML US Inc. (USA) )
J. Quaedackers ( ASML Netherlands B.V. (Netherlands) )
O. F. A. Larsen ( ASML Netherlands B.V. (Netherlands) )
J. Meessen ( ASML Netherlands B.V. (Netherlands) )
E. van der Heijden ( ASML Netherlands B.V. (Netherlands) )
G. Dicker ( ASML Netherlands B.V. (Netherlands) )
O. Wismans ( ASML Netherlands B.V. (Netherlands) )
P. de Haas ( ASML Netherlands B.V. (Netherlands) )
K. van I. Schenau ( ASML Netherlands B.V. (Netherlands) )
J. Finders ( ASML Netherlands B.V. (Netherlands) )
B. Vleeming ( ASML Netherlands B.V. (Netherlands) )
G. Storms ( IMEC (Belgium) )
P. Jaenen ( IMEC (Belgium) )
S. Cheng ( IMEC (Belgium) )
M. Maenhoudt ( IMEC (Belgium) )
10 more
Publication title:
Optical microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6520
Pub. date:
2007
Vol.:
6520
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466396 [0819466395]
Language:
English
Call no.:
P63600/6520
Type:
Conference Proceedings

Similar Items:

Ronse,K., Vandenberghe,G., Jaenen,P., Delvaux,C., Vangoidsenhoven,D., Roey,F.Van, Pollers,I., Maenhoudt,M., …

SPIE - The International Society for Optical Engineering

Schenau,K.van Ingen, Vleeming,B., Ansem,W.F.Gehoel-van, Wong,P., Vandenberghe,G.N.

SPIE-The International Society for Optical Engineering

Park, J., Hsu, S., Van Den Broeke, D., Chen, J. F., Dusa, M., Socha, R., Finders, J., Vleeming, B., van Oosten, A., …

SPIE - The International Society of Optical Engineering

V. Wiaux, S. Verhaegen, S. Cheng, F. Iwamoto, P. Jaenen

Society of Photo-optical Instrumentation Engineers

J. Finders, M. Dusa, B. Vleeming, H. Megens, B. Hepp

Society of Photo-optical Instrumentation Engineers

T. Ando, M. Takeshita, R. Takasu, Y. Yoshii, J. Iwashita

Society of Photo-optical Instrumentation Engineers

R. de Kruif, K. Bubke, G.-J. Janssen, E. van der Heijden, J. Fochler

Society of Photo-optical Instrumentation Engineers

I. Englard, P. Vanoppen, J. Finders, I. Minnaert-Janssen, F. Duray, J. Meessen, G. Janssen, O. Adan, L. Gershtein, R. …

SPIE - The International Society of Optical Engineering

W. H. Arnold, M. Dusa, J. Flinders

SPIE - The International Society of Optical Engineering

S. Kim, S. Koo, J. Choi, Y. Hwang, J. Park, E. Kang, C. Lim, S. Moon, J. Kim

SPIE - The International Society of Optical Engineering

K. Bubke, E. Cotte, J. H. Peters, R. de Kruif, M. Dusa

Society of Photo-optical Instrumentation Engineers

Socha,R.J., Dusa,M.V., Capodieci,L., Finders,J., Chen,J.F., Flagello,D.G., Cummings,K.D.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12