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Hyper NA polarized imaging of 45nm DRAM

Author(s):
C. Lim ( Hynix Semiconductor Inc. (South Korea) )
S. Park ( Hynix Semiconductor Inc. (South Korea) )
Y. Hyun ( Hynix Semiconductor Inc. (South Korea) )
J. Kim ( Hynix Semiconductor Inc. (South Korea) )
T. Eom ( Hynix Semiconductor Inc. (South Korea) )
J. Park ( Hynix Semiconductor Inc. (South Korea) )
S. Moon ( Hynix Semiconductor Inc. (South Korea) )
2 more
Publication title:
Optical microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6520
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466396 [0819466395]
Language:
English
Call no.:
P63600/6520
Type:
Conference Proceedings

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