Defects, overlay, and focus performance improvements with five generations of immersion exposure systems
- Author(s):
J. Mulkens ( ASML Netherlands B.V. (Netherlands) ) B. Streefkerk ( ASML Netherlands B.V. (Netherlands) ) H. Jasper ( ASML Netherlands B.V. (Netherlands) ) J. de Klerk ( ASML Netherlands B.V. (Netherlands) ) F. de Jong ( ASML Netherlands B.V. (Netherlands) ) L. Levasier ( ASML Netherlands B.V. (Netherlands) ) M. Leenders ( ASML Netherlands B.V. (Netherlands) ) - Publication title:
- Optical microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6520
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466396 [0819466395]
- Language:
- English
- Call no.:
- P63600/6520
- Type:
- Conference Proceedings
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