Blank Cover Image

Photoresist adhesion effect of resist reflow process

Author(s):
J. Park ( Hanyang Univ. (South Korea) ) , ( Hynix Semiconductor Inc. (South Korea) )
J. Lee ( Hanyang Univ. (South Korea) )
M. Kim ( Seoul National Univ. (South Korea) )
J. Kim ( Seoul National Univ. (South Korea) )
S. Lee ( Seoul National Univ. (South Korea) )
C. Bok ( Hynix Semiconductor Inc. (South Korea) )
S. Moon ( Hynix Semiconductor Inc. (South Korea) )
S. Park ( Hanyang Univ. (South Korea) )
J. Hong ( Hanyang Univ. (South Korea) )
H. Oh ( Hanyang Univ. (South Korea) )
5 more
Publication title:
Advances in resist materials and processing technology XXIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6519
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466389 [0819466387]
Language:
English
Call no.:
P63600/6519
Type:
Conference Proceedings

Similar Items:

Joo, H.S., Seo, D.C., Kim, C.M., Lim, Y.T., Cho, S.D., Lee, J.B., Song, J.Y., Kim, K.M., Park, J.H., Jung, J.C., Shin, …

SPIE - The International Society of Optical Engineering

J.-M. Park, J.-H. Yoo, J.-Y. Hong, I. An, H.-K. Oh

Society of Photo-optical Instrumentation Engineers

Kim, J.-W., Son, E.-K., Lee, S.-H., Kim, D., Kim, J., Lee, G., Jung, J.C., Bok, C.K., Moon, S.C., Shin, K.S.

SPIE - The International Society of Optical Engineering

J.-M. Park, H. Jeong, I. An, H.-K. Oh

Society of Photo-optical Instrumentation Engineers

Kim, S.-K., An, I., Oh, H.-K., Lee, S. M., Bok, C. K., Moon, S. C.

SPIE - The International Society of Optical Engineering

Joo, H.-S., Seo, D.C., Kim, C.M., Lim, Y.T., Cho, S.D., Lee, J.B., Jeon, H.P., Park, J.H., Jung, J.C., Shin, K.S., Bok, …

SPIE-The International Society for Optical Engineering

Kim, S.-K., An, I., Oh, H.-K., Lee, S. M., Bok, C. K., Moon, S. C.

SPIE - The International Society of Optical Engineering

Park,J.-H., Kim,S.-J., Park,S.-Y., Lee,H., Jung,J.-C., Bok,C.-K., Baik,K.-H.

SPIE-The International Society for Optical Engineering

J.-M. Park, Y.-M. Kang, S.-W. Park, J.-Y. Hong, H.-K. Oh

Society of Photo-optical Instrumentation Engineers

Choi,J.-H., Kim,C.-Y., Lee,J.-Y., Moon,S.-W., Choi,S.-W., Han,W.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering

J.-M. Park, I. An, H.-K. Oh

Society of Photo-optical Instrumentation Engineers

12 Conference Proceedings Resist cracking and adhesion improvement

Lee, I.-H., Lee, J.-S., Lee, K.-Y., Park, C.-G., Choi, J.-S., Lee, J.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12