Blank Cover Image

Material design of negative-tone polyphenol resist for EUV and EB lithography

Author(s):
  • K. Kojima ( Hitachi, Ltd. (Japan) )
  • S. Mori ( Hitachi ULSI Systems. Co., Ltd. (Japan) )
  • D. Shiono ( Tokyo Ohka Kogyo Co., Ltd. (Japan) )
  • H. Hada ( Tokyo Ohka Kogyo Co., Ltd. (Japan) )
  • J. Onodera ( Tokyo Ohka Kogyo Co., Ltd. (Japan) )
Publication title:
Advances in resist materials and processing technology XXIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6519
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466389 [0819466387]
Language:
English
Call no.:
P63600/6519
Type:
Conference Proceedings

Similar Items:

Kojima, K, Hattori, T, Fukuda, H, Hirayama, T, Shiono D, Hada, H, Onodera, J

SPIE - The International Society of Optical Engineering

Watanabe,T., Kinoshita,H., Miyafuji,A., Irie,S., Shirayone,S., Mori,S., Yano,E., Hada,H., Ohmori,K., Komano,H.

SPIE - The International Society for Optical Engineering

Shiono, D., Hirayama, T., Hada, H., Onodera, J., Arai, T., Yamaguchi, A., Kojima, K., Shiraishi, H., Fukuda, H.

SPIE - The International Society of Optical Engineering

Kuhara,K., Mori,S., Kaimoto,Y., Morisawa,T., Ohfuji,T., Sasago,M.

SPIE-The International Society for Optical Engineering

D. Shiono, H. Hada, H. Yukawa, H. Oizumi, I. Nishiyama, K. Kojima, H. Fukuda

SPIE - The International Society of Optical Engineering

9 Conference Proceedings Negative-tone 193-nm resists

Cho,S., Heyden,A.Vander, Byers,J.D., Willson,C.G.

SPIE - The International Society for Optical Engineering

4 Conference Proceedings A new 193nm resist

Hirayama, T., Shiono, D., Matsumaru, S., Ogata, T., Hada, H., Onodera, J., Arai, T., Sakamizu, T., Yamaguchi, A., …

SPIE - The International Society of Optical Engineering

Migitaka,S., Uchino,S., Ueno,T., Yamamoto,J., Kojima,K., Hashimoto,M., Shiraishi,H.

SPIE-The International Society for Optical Engineering

Hada, H., Iwai, T., Nakayama, T.

SPIE - The International Society of Optical Engineering

Havard,J.M., Pasini,D., Frechet,J.M.J., Medeiros,D.R., Patterson,K., Yamada,S., Willson,C.G.

SPIE-The International Society for Optical Engineering

Patel, K.S., Lawson, M.C., Varanasi, P.R., Medeiros, D.R., Wallraff, G.M., Brock, P.J., DiPietro, R.A., Nishimura, Y., …

SPIE - The International Society of Optical Engineering

Taku Hirayama, Daiju Shiono, Shogo Matsumaru, Toshiyuki Ogata, Hideo Hada, Junichi Onodera, Tadashi Arai, Toshio …

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12