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FTIR measurements of compositional heterogeneities

Author(s):
S. Kang ( National Institute of Standards and Technology (USA) )
B. D. Vogt ( National Institute of Standards and Technology (USA) )
W. Wu ( National Institute of Standards and Technology (USA) )
V. M. Prabhu ( National Institute of Standards and Technology (USA) )
D. L. VanderHart ( National Institute of Standards and Technology (USA) )
A. Rao ( National Institute of Standards and Technology (USA) )
E. K. Lin ( National Institute of Standards and Technology (USA) )
K. Turnquest ( Sematech, Inc. (USA) )
3 more
Publication title:
Advances in resist materials and processing technology XXIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6519
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466389 [0819466387]
Language:
English
Call no.:
P63600/6519
Type:
Conference Proceedings

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