Characterization of photo-acid redeposition in 193-nm photoresists
- Author(s):
T. Wallow ( Advanced Micro Devices, Inc. (USA) ) M. Plat ( Spansion LLC. (USA) ) Z. Zhang ( Spansion LLC. (USA) ) B. MacDonald ( Spansion LLC. (USA) ) J. Bernard ( Spansion LLC. (USA) ) J. Romero ( Spansion LLC. (USA) ) B. L. Fontaine ( Advanced Micro Devices, Inc. (USA) ) H. J. Levinson ( Advanced Micro Devices, Inc. (USA) ) - Publication title:
- Advances in resist materials and processing technology XXIV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6519
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466389 [0819466387]
- Language:
- English
- Call no.:
- P63600/6519
- Type:
- Conference Proceedings
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