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The novel advanced process control to eliminate AlCu-PVD induced overlay shift

Author(s):
C. Huang ( Macronix International Co., Ltd. (Taiwan) )
C. Yang ( Macronix International Co., Ltd. (Taiwan) )
E. Yang ( Macronix International Co., Ltd. (Taiwan) )
T. Yang ( Macronix International Co., Ltd. (Taiwan) )
K. Chen ( Macronix International Co., Ltd. (Taiwan) )
J. Ku ( Macronix International Co., Ltd. (Taiwan) )
C. Lu ( Macronix International Co., Ltd. (Taiwan) )
2 more
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

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