Blank Cover Image

Resolution enhancement technique using oxidation process with nitride hardmask process

Author(s):
  • E. Jeong ( DongbuElectronics (South Korea) )
  • J. Kim ( DongbuElectronics (South Korea) )
  • K. Kim ( DongbuElectronics (South Korea) )
  • D. Kim ( DongbuElectronics (South Korea) )
  • H. Lim ( DongbuElectronics (South Korea) )
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Silicon-based anti-reflective spin-on hardmask materials with improved storage stability for 193-nm lithography

S. K. Kim, S. H. Lim, D. Kim, S. R. Koh, M. Kim, H. C. Yoon, D. S. Uh, J. S. Kim, T. Chang

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Double patterning in lithography for 65nm node with oxidation process

E. Jeong, J. Kim, K. Choi, M. Lee, D. Lee

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Resolution enhancement techniques for halftoned images

B. T. Ryu, J. O. Lee, C. Kim, H. K. Lee, S. H. Kim

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Resolution enhancement techniques in 65 nm node nested-hole patterning

H. Lee, J. Choi, J. Kim, J.-W. Han, K.-Y. Kim

Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Spin-on organic hardmask materials in 70nm devices

C. Oh, D. Uh, D. Kim, J. Lee, H. Yun, I. Nam, M. Kim, K. Yoon, K. Hyung, N. Tokareva, H. Cheon, J. Kim, T. Chang

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Hardmask/BARC materials for 157-nm lithography

Kim,W.D., Miller,D.A., Kim,H.S., Byers,J.D., Daniels,M., Birmingham,B., Tompkins,J.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Process Conditions and Interfacial Characteristics of Al/Cu Clad Composite Formed by Hot Hydrostatic Extrusion

Yoon, D. J., Jeong, H. G., Lim, S. J., Na, K. H., Kim, E. Z.

Trans Tech Publications
10 Conference Proceedings UV -nanoimprint lithography using a diamond-like carbon stamp [6151-92]

Jeong, J., Kim, K., Sim, Y., Choi, D., Lee, E., Park, S., Lim, T., Yang, D.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Vertical-cavity surface-emitting lasers fabricated using a sealing of AIAs against wet oxidation

Lim,D.H., Yang,G.M., Kim,J.-H., Lim,K.Y., Lee,H.J.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Study for aluminum metal patterning process with oxide hardmask In 90-nm s-flash memory device fabrication

S. I. Hwang, K. J. Yun, S. W. Ryu, K. H. Lee, J. W. Han

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Concentration effect of the Au-pattern on a cellulose paper using μ-contact printing technique

H. K. Lim, K. Y. Cho, J. Kim, K. S. Kang

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Enhanced 3D correlator using Blur metric-based resolution enhancement

K.-J. Eun, K.-J. Lee, D.-C. Hwang, E.-S. Kim

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12