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Plasma-assisted cleaning by electrostatics (PACE)

Author(s):
  • W. M. Lytle ( Univ. of Illinois at Urbana-Champaign (USA) )
  • H. Shin ( Univ. of Illinois at Urbana-Champaign (USA) )
  • D. N. Ruzic ( Univ. of Illinois at Urbana-Champaign (USA) )
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. date:
2007
Vol.:
6518
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

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