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Accurate and reliable optical CD of MuGFET down to 10nm

Author(s):
P. Leray ( IMEC (Belgium) )
G. F. Lorusso ( IMEC (Belgium) )
S. Cheng ( IMEC (Belgium) )
N. Collaert ( IMEC (Belgium) )
M. Jurczak ( IMEC (Belgium) )
S. Shirke ( VLSI Standard (USA) )
1 more
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

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