Blank Cover Image

Overlay metrology for dark hard mask process: simulation and experiment study

Author(s):
J. Shin ( Samsung Semiconductor Research and Development (South Korea) )
R. Chalykh ( Samsung Semiconductor Research and Development (South Korea) )
H. Kang ( Samsung Semiconductor Research and Development (South Korea) )
S. Kim ( Samsung Semiconductor Research and Development (South Korea) )
S. Lee ( Samsung Semiconductor Research and Development (South Korea) )
H. Cho ( Samsung Semiconductor Research and Development (South Korea) )
1 more
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

Similar Items:

Kim, S. S., Park, J., Chalykh, R., Kang, J., Lee, S., Woo, S. G., Cho, H. K., Moon, J. T.

SPIE - The International Society of Optical Engineering

Kim, D. Y., Shin, C., Jung, H. S., Cho, J. S.

SPIE - The International Society of Optical Engineering

R. Chalykh, I. Pundaleva, J. Shin, S. Kim, H. Cho, J. Moon

SPIE - The International Society of Optical Engineering

E. Cho, M. Lee, D. Shin, S. Hwang, S. Ryu

Society of Photo-optical Instrumentation Engineers

Chalykh, R., Pundaleva, I., Kim, S., Cho, H.-K., Moon, J.-T.

SPIE - The International Society of Optical Engineering

I. Pundaleva, R. Chalykh, M. Lee, H. Kim, B. Kim

Society of Photo-optical Instrumentation Engineers

I. Pundaleva, R. Chalykh, H. Kim, B. Kim, H. Cho

SPIE - The International Society of Optical Engineering

Park, -J. S., Yoon, -H. K., Kang, -H. J., Choi, -Y. J., Lee, -S. Y., Kim. K.

SPIE - The International Society of Optical Engineering

Lee, K., Kim, S., Lee, G., Lee, S., Cho J, Kim W, Bok C, Kim H, Moon S, Kim J

SPIE - The International Society of Optical Engineering

Lee, T. Y., Lee, B. H., Chin, S. B., Cho, Y. S, Hong, J. S., Song, C. L

SPIE - The International Society of Optical Engineering

Park, J., Kim, -S. S., Lee, S., Woo, -G. S., Cho, -K. H., Moon, -T. J.

SPIE - The International Society of Optical Engineering

Lee, H.-R., Shin, J., Kim, H.-W., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12