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Device metrology with high-performance scanning ion beams

Author(s):
D. C. Joy ( Univ. of Tennessee (USA) )
B. J. Griffin ( Univ. of Tennessee (USA) and Univ. of Western Australia (Australia) )
J. Notte ( ALIS Corp. (USA) )
L. Stern ( ALIS Corp. (USA) )
S. McVey ( ALIS Corp. (USA) )
B. Ward ( ALIS Corp. (USA) )
C. Fenner ( ALIS Corp. (USA) )
2 more
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

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