Application of carbon nanotube probes in a critical dimension atomic force microscope
- Author(s):
B. C. Park ( Korea Research Institute of Standards and Science (South Korea) ) J. Choi ( Korea Research Institute of Standards and Science (South Korea) and Chungnam National Univ. (South Korea) ) S. J. Ahn ( Korea Research Institute of Standards and Science (South Korea) ) D. Kim ( Korea Research Institute of Standards and Science (South Korea) ) J. Lyou ( Chungnam National Univ. (South Korea) ) R. Dixson ( National Institute of Standards and Technology (USA) ) N. G. Orji ( National Institute of Standards and Technology (USA) ) J. Fu ( National Institute of Standards and Technology (USA) ) T. V. Vorburger ( National Institute of Standards and Technology (USA) ) - Publication title:
- Metrology, inspection, and process control for microlithography XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6518
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466372 [0819466379]
- Language:
- English
- Call no.:
- P63600/6518
- Type:
- Conference Proceedings
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