Blank Cover Image

Single crystal critical dimension reference materials (SCCDRM): process optimization for the next generation of standards

Author(s):
  • R. G. Dixson ( National Institute of Standards and Technology (USA) )
  • W. F. Guthrie ( National Institute of Standards and Technology (USA) )
  • M. Cresswell ( National Institute of Standards and Technology (USA) )
  • R. A. Allen ( National Institute of Standards and Technology (USA) )
  • N. G. Orji ( National Institute of Standards and Technology (USA) )
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Traceable atomic force microscope dimensional metrology at NIST [6152-25]

Dixson, R., Orji, N. G., Fu, J., Cresswell, M., Allen, R., Guthrie, W.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Photomask applications of traceable atomic force microscope dimensional metrology at NIST

R. Dixson, N. G. Orji, J. Potzick, J. Fu, R. A. Allen

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings TEM calibration methods for critical dimension standards

N. G. Orji, R. G. Dixson, D. I. Garcia-Gutierrez, B. D. Bunday, M. Bishop, M. W. Cresswell, R. A. Allen, J. A. Allgair

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Progress on implementation of a CD-AFM・based reference measurement system [6152-24]

Orji, N. G., Martinez, A., Dixson, R., Allgair, J.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Comparison and uncertainties of standards for critical dimension atomic force microscope tip width calibration

R. Dixson, N. G. Orji

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Reference metrology using a next-generation CD-AFM

Dixson, R., Guerry, A.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Re-calibration of the NIST SRM 2059 master standard using traceable atomic force microscope metrotogy

R. Dixson, J. Potzick, N. G. Orji

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings Application of carbon nanotube probes in a critical dimension atomic force microscope

B. C. Park, J. Choi, S. J. Ahn, D. Kim, J. Lyou, R. Dixson, N. G. Orji, J. Fu, T. V. Vorburger

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Accuracy considerations for critical dimension semiconductor metrology

N. G. Orji, R. G. Dixson, B. D. Bunday, J. A. Allgair

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Comparison of properties of electrical test structures patterned in BESOI and SIMOX films for CD reference-material applications

Allen,R.A., Ghoshtagore,R.N., Cresswell,M.W., Linholm,L.W., Sniegowski,J.J.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings CD reference materials for sub-10th μm applications

Cresswell, M.W., Bogardus, E.H., de Pinillos, J.V.M., Bennett, M.H., Allen, R.A., Guthrie, W.F., Murabito, C.E., am …

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Silicon single atom steps as AFM height standards

Dixson,R.G., Orji,N.G., Fu,J., Tsai,V., Williams,E.D., Kacker,R., Vorburger,T.V., Edwards,H.L., Cook,D., West,P.E., …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12