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Single crystal critical dimension reference materials (SCCDRM): process optimization for the next generation of standards

Author(s):
  • R. G. Dixson ( National Institute of Standards and Technology (USA) )
  • W. F. Guthrie ( National Institute of Standards and Technology (USA) )
  • M. Cresswell ( National Institute of Standards and Technology (USA) )
  • R. A. Allen ( National Institute of Standards and Technology (USA) )
  • N. G. Orji ( National Institute of Standards and Technology (USA) )
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. date:
2007
Vol.:
6518
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

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