Blank Cover Image

Monte Carlo modeling of secondary electron imaging in three dimensions

Author(s):
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. date:
2007
Vol.:
6518
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

Similar Items:

Villarrubia, J.S., Vladar, A.E., Lowney, J.R., Postek, M.T., Jr.

SPIE-The International Society for Optical Engineering

Amendt,P.A., Estabrook,K.C., Everett,M.J., London,R.A., Maitland,D.J., Zimmerman,G.B., Colston,B.W.,Jr., Silva,L.B.Da, …

SPIE - The International Society for Optical Engineering

Villarrubia,J.S., Vladar,A.E., Lowney,J.R., Postek,M.T., Allen,R.A., Cresswell,M.W., Ghoshtagore,R.N.

SPIE - The International Society for Optical Engineering

Thoma R., Peifer H. J., Engl W. L., Quade W., Brunetti R., Jacoboni C.

Plenum Press

Pfefer,T.J., Barton,J.K., Chan,E.K., Ducros,M.G., Sorg,B.S., Milner,T.E., Nelson,J.S., Welch,A.J.

SPIE-The International Society for Optical Engineering

Hubbard, R. P., Oschmann, Jr., J. M.

SPIE - The International Society of Optical Engineering

Villarrubia,J.S., Vladar,A.E., Lowney,J.R., Postek Jr.,M.T.

SPIE-The International Society for Optical Engineering

Li, K., Lu, J. Q., Brock, R. S., Yang, B., Zhao, S., Hu, X. -H.

SPIE - The International Society of Optical Engineering

Kim,B.-M., Gentile,N.A., Trauner,K.B., London,R.A.

SPIE - The International Society for Optical Engineering

Smale, M. W., Strohl, J. K.., Donnelly, R. G., King, T. S.

American Institute of Chemical Engineers

John S. Villarrubia, Ronald G. Dixson, Samuel N. Jones, Jeremiah R. Lowney, Michael T. Postek, Jr.

SPIE - The International Society of Optical Engineering

12 Conference Proceedings Acoustic imaging in three dimensions

Mrtin F. J., Marsh K., Richardson M. J., Rivera G.

Springer-Verlag

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12