Blank Cover Image

The application of SMASH alignment system for 65-55-nm logic devices

Author(s):
M. Miyasaka ( NEC Electronics Corp. (Japan) )
H. Saito ( NEC Electronics Corp. (Japan) )
T. Tamura ( NEC Electronics Corp. (Japan) )
T. Uchiyama ( NEC Electronics Corp. (Japan) )
P. Hinnen ( ASML (Netherlands) )
H. Lee ( ASML (Netherlands) )
M. van Kemenade ( ASML (Netherlands) )
M. Shahrjerdy ( ASML (Netherlands) )
R. van Leeuwen ( ASML (Netherlands) )
4 more
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. date:
2007
Vol.:
6518
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

Similar Items:

T. Uchiyama, T. Tamura, K. Yoshimochi, P. Graupner, H. Bakker, E. van Setten, K. Morisaki

SPIE - The International Society of Optical Engineering

Kikuiri, N., Murakami, S., Tsuchiya, H., Tateno, M., Takahara, K., Imai, S., Hirano, R., Isomura, I., Tsuji, Y., Tamura, …

SPIE - The International Society of Optical Engineering

H. Megens, R. van Haren, S. Musa, M. Doytcheva, S. Lalbahadoersing, M. van Kemenade, H. Lee, P. Hinnen, F. van Bilsen

SPIE - The International Society of Optical Engineering

Chakravorty, K. K., Henrichs, S., Qiu, W., Chavez, J. L., Liu, Y.-P., Ghadiali, F., Yung, K., Wilcox, N., Silva, M., Ma, …

SPIE - The International Society of Optical Engineering

T. Murakami, T. Nakata, K. Taniguchi, T. Uchiyama, M. Jyousaka

Society of Photo-optical Instrumentation Engineers

Yamada,Y., Kobinata,H., Tamura,T., Miyasaka,M., Sakamoto,T., Ogawa,Y., Takada,K., Yamashita,H., Nozue,H.

SPIE-The International Society for Optical Engineering

T. Nakata, T. Kodama, M. Komori, N. Onoda, T. Uchiyama

SPIE - The International Society of Optical Engineering

Sarma, R.C., Smayling, M.C., Arora, N., Nagata, T., Duane, M.P., Shah, S., Keston, H.J., Oemardani, S.

SPIE - The International Society of Optical Engineering

P. Hinnen, J. Depre, S. Tanaka, S. Lim, O. Brioso, M. Shahrjerdy, K. Ishigo, T. Kono, T. Higashiki

SPIE - The International Society of Optical Engineering

Nguyen, B.-Y., Them, A., Zhang, D., White, T., Sadaka, M., Triyoso, D., Schaeffer, J., Goolsby, B., Dhandapani, V., …

Electrochemical Society

K. Yoshimochi, T. Tamura, S. Nagahara, T. Uchiyama, N. Farrar

Society of Photo-optical Instrumentation Engineers

M. Trentzsch, C. Golz, K. Wieczorek, R. Stephan, T. Mantei

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12