Gibbsian segregating alloys: a potential solution to minimize collector degradation
- Author(s):
- H. Qiu ( Univ. of Illinois at Urbana-Champaign (USA) )
- S. N. Srivastava ( Univ. of Illinois at Urbana-Champaign (USA) )
- J. C. Anderson ( Univ. of Illinois at Urbana-Champaign (USA) )
- D. N. Ruzic ( Univ. of Illinois at Urbana-Champaign (USA) )
- Publication title:
- Emerging lithographic technologies XI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6517
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466365 [0819466360]
- Language:
- English
- Call no.:
- P63600/6517
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Contamination removal from collector optics and masks: an essential step for next-generation lithography
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Study of the dynamic evolution and spectral properties of multi-component plasmas for EUV production [6151-147]
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Degradation of Magnesium Alloys in Artificial Urine Solution for Urological Device Applications
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Numerical Simulation of Temperature Distribution in Conductive Asphalt Solar Collector due to Pavement Material Parameters
Trans Tech Publications |
6
Conference Proceedings
Gibbsian check of the validity of Gibbsian caluculation throgh dynamical observables
Plenum Press |
SPIE - The International Society of Optical Engineering |