Laser-produced plasma source system development
- Author(s):
I. V. Fomenkov ( Cymer, Inc. (USA) ) D. C. Brandt ( Cymer, Inc. (USA) ) A. N. Bykanov ( Cymer, Inc. (USA) ) A. I. Ershov ( Cymer, Inc. (USA) ) W. N. Partlo ( Cymer, Inc. (USA) ) D. W. Myers ( Cymer, Inc. (USA) ) N. R. Bowering ( Cymer, Inc. (USA) ) G. O. Vaschenko ( Cymer, Inc. (USA) ) O. V. Khodykin ( Cymer, Inc. (USA) ) J. R. Hoffman ( Cymer, Inc. (USA) ) E. Vargas L. ( Cymer, Inc. (USA) ) R. D. Simmons ( Cymer, Inc. (USA) ) J. A. Chavez ( Cymer, Inc. (USA) ) C. P. Chrobak ( Cymer, Inc. (USA) ) - Publication title:
- Emerging lithographic technologies XI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6517
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466365 [0819466360]
- Language:
- English
- Call no.:
- P63600/6517
- Type:
- Conference Proceedings
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