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Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles

Author(s):
T. Higashiguchi ( Univ. of Miyazaki (Japan) )
S. Suetake ( Univ. of Miyazaki (Japan) )
Y. Senba ( Univ. of Miyazaki (Japan) )
Y. Sato ( Univ. of Miyazaki (Japan) )
A. Hosotani ( Univ. of Miyazaki (Japan) )
Y. Takahashi ( Univ. of Miyazaki (Japan) )
S. Kubodera ( Univ. of Miyazaki (Japan) )
2 more
Publication title:
Emerging lithographic technologies XI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6517
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466365 [0819466360]
Language:
English
Call no.:
P63600/6517
Type:
Conference Proceedings

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