Effect of deposition, sputtering, and evaporation of lithium debris buildup on EUV optics

Effect of deposition, sputtering, and evaporation of lithium debris buildup on EUV optics

Author(s):

M. J. Neumann ( Univ. of Illinois at Urbana-Champaign (USA) )

M. Cruce ( Univ. of Illinois at Urbana-Champaign (USA) )

P. Brown ( Univ. of Illinois at Urbana-Champaign (USA) )

S. N. Srivasta ( Univ. of Illinois at Urbana-Champaign (USA) )

D. N. Ruzic ( Univ. of Illinois at Urbana-Champaign (USA) )

O. Khodykin ( Cymer (USA) )

1 more

Publication title:

Emerging lithographic technologies XI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6517

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466365 [0819466360]

Language:

English

Call no.:

P63600/6517

Type:

Conference Proceedings

Details

TDL ID:	ZA00046824
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging Lithographic Technologies
Conf. info. (Number):	2007 : 11th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.02.27-2007.03.01

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