A short-pulsed laser cleaning system for EUVL tool

Author(s):

• M. Yonekawa ( Canon Inc. (Japan) )
• H. Namba ( Canon Inc. (Japan) )
• T. Hayashi ( Canon Inc. (Japan) )
• Y. Watanabe ( Canon Inc. (Japan) )

Publication title:

Emerging lithographic technologies XI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6517

Pub. date:

2007

Vol.:

6517

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466365 [0819466360]

Language:

English

Call no.:

P63600/6517

Type:

Conference Proceedings