A CMOS-compatible rib waveguide with local oxidation of silicon isolation

A CMOS-compatible rib waveguide with local oxidation of silicon isolation

Author(s):

L. K. Rowe ( Carleton Univ. (Canada) )
M. Elsey ( McMaster Univ. (Canada) )
E. Post ( National Research Council Canada (Canada) )
N. G. Tarr ( Carleton Univ. (Canada) )
A. P. Knights ( McMaster Univ. (Canada) )

Publication title:

Silicon photonics II : 22-25 January 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6477

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465900 [0819465909]

Language:

English

Call no.:

P63600/6477

Type:

Conference Proceedings

Details

TDL ID:	ZA00046785
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Silicon Photonics
Conf. info. (Number):	2007 : 2nd
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2007.01.22-2007.01.25

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