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Nano patterning fabrication by low energy microcolumn lithography

Author(s):
T. Yoshimoto ( Sun Moon Univ. (South Korea) )
S. H. Hwang ( Inha Univ. (South Korea) )
K. H. Kim ( Inha Univ. (South Korea) )
D. J. Seong ( Sun Moon Univ. (South Korea) )
D. W. Kim ( Sun Moon Univ. (South Korea) )
Y. C. Kim ( Sun Moon Univ. (South Korea) )
S. J. Ahn ( Sun Moon Univ. (South Korea) )
H. S. Kim ( Sun Moon Univ. (South Korea) )
3 more
Publication title:
Optoelectronic integrated circuits IX : 22-24 January 2007, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6476
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465894 [0819465895]
Language:
English
Call no.:
P63600/6476
Type:
Conference Proceedings

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