Piston-tip-tilt positioning of a segmented MEMS deformable mirror

Piston-tip-tilt positioning of a segmented MEMS deformable mirror

Author(s):

M. A. Helmbrecht ( Iris AO, Inc. (USA) )
T. Juneau ( SiTime, Inc. (USA) )

Publication title:

MEMS adaptive optics : 24-25 January 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6467

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465801 [0819465801]

Language:

English

Call no.:

P63600/6467

Type:

Conference Proceedings

Details

TDL ID:	ZA00046775
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS Adaptive Optics
Conf. info. (Number):	2007
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.01.24-2007.01.25

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